Hexamethyldisilazane, 1,1,1,3,3,3-.
[dimethyl-(trimethylsilylamino)silyl]methane, HMDS
How to detect Hexamethyldisilazane, 1,1,1,3,3,3-.
Formula: C6H18NSi2 | CAS: 999-97-3
Synonyms: [dimethyl-(trimethylsilylamino)silyl]methane, HMDS
Specification
Specification | Value/Information |
---|---|
Formula | C6H18NSi2 |
CAS no. | 999-97-3 |
Gas Response Factor, 11.7 eV | 0.53 |
Gas Response Factor, 10.6 eV | 0.45 |
Gas Response Factor, 10.0 eV | 0.50 |
ppm per mg/m⁻³, (20 °C, 1 bar) | 0.149 |
Molecular Weight, g/mole | 161.4 |
Specification | Value/Information |
---|---|
Melting point, °C | -82 |
Boiling point, °C | 127 |
Flash point, °C | 8 |
Upper Explosive Limit, % | 31 |
Lower Explosive Limit, % | 0.8 |
Density, g.cm⁻³ | 0.765 |
Ionisation Energy, eV | 8.6 |